Research on Micro-piezoresistive Accelerometer with Slotted Beams
نویسندگان
چکیده
منابع مشابه
Design and fabrication of a GaAs/Al0.4Ga0.6As micro-accelerometer based on piezoresistive effect
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ژورنال
عنوان ژورنال: Sensors and Materials
سال: 2020
ISSN: 0914-4935
DOI: 10.18494/sam.2020.3079